The effect of substrate temperature on the properties of (AlCrNbSiTiV)N films deposited by HIPIMS
Crossref DOI link: https://doi.org/10.1007/s00170-019-04251-7
Published Online: 2019-08-26
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Zhi-wei
Hsu, Chun-Yao
Wu, Ming-Chang
Tsao, Chung-Chen
Text and Data Mining valid from 2019-08-26
Version of Record valid from 2019-08-26
Article History
Received: 24 May 2019
Accepted: 1 August 2019
First Online: 26 August 2019