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Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Crossref DOI link: https://doi.org/10.1007/s00170-019-04886-6

Published Online: 2020-01-09

Published Print: 2020-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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