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Authors
Lu, Te-Yun
Yang, Yu-Pu
Lo, Hsiao-Han
Wang, Peter J.
Lai, Walter
Fuh, Yiin-Kuen
Li, Tomi T.
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Funding
Funding for this research was provided by:
Delta Electronics, Inc. (108K92)
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Article History
Received: 17 October 2020
Accepted: 25 March 2021
First Online: 4 April 2021
Declarations
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: Since the study is performed on the silicon samples, there is no need for ethical approval; however, all the tests are done at National Central University, in the Optical Sciences Center, and SEM and XRD Labs of Precious Instrument Utilization Center under the control of trained experts. Additionally, the paper’s main data is not published elsewhere.
: All authors declare that they have agreed for authorship, have read and approved the manuscript, and have given consent for submission and subsequent publication of the manuscript.
: All authors are consenting to publish this article with its included data in The International Journal of Advanced Manufacturing Technology and approve its final version.
: The authors declare no competing interests.
