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Development of positioning error measurement system based on geometric optics for long linear stage

Published Online: 2021-05-27

Published Print: 2021-08

Authors

Liu, Chien-Sheng http://orcid.org/0000-0002-3537-5828
Zeng, Jie-Yu

Chen, Yu-Ta
Funding

Funding for this research was provided by:

Ministry of Science and Technology, Taiwan (Grant Nos. MOST 106-2628-E-006-010-MY3 and 108-2218-E-002-071.)
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Text and Data Mining valid from 2021-05-27

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Article History

Received: 16 November 2020

Accepted: 23 May 2021

First Online: 27 May 2021

Declarations

:

: The authors declare no competing interests.

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