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Reference-based Virtual Metrology method with uncertainty evaluation for Material Removal Rate prediction based on Gaussian Process Regression

Published Online: 2021-06-29

Published Print: 2021-09

Authors

Cai, Haoshu

Feng, Jianshe

Yang, Qibo

Li, Fei

Li, Xiang

Lee, Jay
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Text and Data Mining valid from 2021-06-29

Version of Record valid from 2021-06-29
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Article History

Received: 6 January 2021

Accepted: 3 June 2021

First Online: 29 June 2021

Declarations

:

: The authors declare no competing interests.

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