Lo, Hsiao-Han
Chen, Wei-Lun
Wang, Peter J.
Lai, Walter
Fuh, Yiin-Kuen
Li, Tomi T.
Funding for this research was provided by:
delta electronics, inc. (108K92)
Article History
Received: 20 July 2021
Accepted: 7 January 2022
First Online: 25 January 2022
Declarations
:
: Since the study is performed on the silicon samples, there is no need for ethical approval; however, all the tests are done in National Central University, in the Optical Sciences Center, and in SEM and XRD Labs of Precious Instrument Utilization Center under the control of trained experts. Additionally, the paper main data are not published elsewhere.
: All authors declare that have agreed for authorship, have read and approved the manuscript, and have given the consent for submission and subsequent publication of the manuscript.
: All authors are consenting to publish this article with its included data in The International Journal of Advanced Manufacturing Technology and approve its final version.
: The authors declare that they have no competing of interest.