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Evaluation method for the machining accuracy of diamond wire squaring mono-crystalline silicon and its application in comparison of reciprocating wire and endless wire

Crossref DOI link: https://doi.org/10.1007/s00170-022-08865-2

Published Online: 2022-02-09

Published Print: 2022-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Qiu, Jian

Liu, Chongning

Li, Xiaofei
Funding

Funding for this research was provided by:

shandong provincial finance department
License Information

Text and Data Mining valid from 2022-02-09

Version of Record valid from 2022-02-09
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Article History

Received: 29 June 2021

Accepted: 1 February 2022

First Online: 9 February 2022

Declarations

:

: This work has no potential conflicts of interest. This work has no research involving human participants and/or animals.

: Not applicable.

: Not applicable.

: The authors declare no competing interests.

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