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Modeling and experimental study on the edge chipping of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) with ultra-micro-grinding (UMG) tools with diameters ~ 100 µm

Crossref DOI link: https://doi.org/10.1007/s00170-022-09484-7

Published Online: 2022-06-14

Published Print: 2022-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Song, Kefeng

Liu, Chunmi

Wang, Jue

Guo, Zhaozhi

Yang, Songhao

Cheng, Jun
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (No.51575096)

China Fundamental Research Funds for the Central Universities (No.N180304014)
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Article History

Received: 19 October 2021

Accepted: 31 May 2022

First Online: 14 June 2022

Declarations

:

: The authors declare that there is no ethical issue applied to this paper.

: The authors declare that all authors have read and approved to submit this paper to The International Journal of Advanced Manufacturing Technology.

: The authors confirm the publication of this paper has been approved by all co-authors and its publication has been approved by the responsible authorities at the institution where the work is carried out.

: The authors declare no competing interests.

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