Optimization of plasma etch rate of deposited thin films by adaptive neuro fuzzy inference system
Crossref DOI link: https://doi.org/10.1007/s00170-022-10198-z
Published Online: 2022-09-24
Published Print: 2022-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Petrovic, Nikola
Text and Data Mining valid from 2022-09-24
Version of Record valid from 2022-09-24
Article History
Received: 30 May 2022
Accepted: 21 September 2022
First Online: 24 September 2022
Declarations
:
: Not applicable.
: The author declares no competing interests.