Research on weakly alkaline bulk slurries relevant to chemical mechanical polishing for cobalt interconnects
Crossref DOI link: https://doi.org/10.1007/s00170-023-10824-4
Published Online: 2023-02-08
Published Print: 2023-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Lifei http://orcid.org/0000-0002-7790-9509
Wang, Tongqing
Lu, Xinchun
Text and Data Mining valid from 2023-02-08
Version of Record valid from 2023-02-08
Article History
Received: 18 August 2022
Accepted: 9 January 2023
First Online: 8 February 2023
Declarations
:
: Written informed consent for publication was obtained from all participants.
: The authors declare no competing interests.