Study on the uniformity of microgrooves in through-mask electrochemical micromachining with moving cathode
Crossref DOI link: https://doi.org/10.1007/s00170-023-11629-1
Published Online: 2023-06-07
Published Print: 2023-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhai, Ke
Zhou, Feng
Wen, Yikui
Xu, Wenya
Du, Liqun
Text and Data Mining valid from 2023-06-07
Version of Record valid from 2023-06-07
Article History
Received: 27 December 2022
Accepted: 22 May 2023
First Online: 7 June 2023
Declarations
:
: The authors declare no competing interests.