Crossmark

Wafer particle inspection technique using computer vision based on a color space transform model

Published Online: 2023-07-05

Published Print: 2023-08

Authors

Chun, Heebum

Wang, Jingyan

Kim, Jungsub

Lee, ChaBum https://orcid.org/0000-0002-0053-6863
License Information

Text and Data Mining valid from 2023-07-05

Version of Record valid from 2023-07-05
More Information

Article History

Received: 23 January 2023

Accepted: 30 June 2023

First Online: 5 July 2023

Declarations

:

: The authors declare no competing interests.

Document is current