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A study on quartz wafer slot polishing by using the ultrasonic-assisted wire electrophoretic deposition method

Published Online: 2023-08-16

Published Print: 2023-10

Authors

Yang, Chun-Hao

Tsui, Hai-Ping https://orcid.org/0000-0002-5297-2077
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Text and Data Mining valid from 2023-08-16

Version of Record valid from 2023-08-16
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Article History

Received: 1 June 2023

Accepted: 10 August 2023

First Online: 16 August 2023

Declarations

:

: The ethics are approved.

: We consent for publication.

: The authors declare no competing interests.

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