Enhancing ceria slurry performance for shallow trench isolation chemical mechanical polishing through non-ionic surfactant addition
Crossref DOI link: https://doi.org/10.1007/s00170-023-12254-8
Published Online: 2023-09-05
Published Print: 2023-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Lifei http://orcid.org/0000-0002-7790-9509
Xie, Lile
Lu, Xinchun
Text and Data Mining valid from 2023-09-05
Version of Record valid from 2023-09-05
Article History
Received: 10 March 2023
Accepted: 27 August 2023
First Online: 5 September 2023
Declarations
:
: The authors declare no competing interests.