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Adaptive polishing path optimization for free-form uniform polishing based on footprint evolution

Published Online: 2024-01-16

Published Print: 2024-02

Authors

Han, Yanjun

Wang, Chong

Zhang, Haiyang

Yu, Menghuan

Chang, Xunchuan

Dong, Jie

Zhang, Yunfei
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Text and Data Mining valid from 2024-01-16

Version of Record valid from 2024-01-16
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Article History

Received: 9 October 2023

Accepted: 6 January 2024

First Online: 16 January 2024

Declarations

:

: The authors declare no competing interests.

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