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Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach

Published Online: 2024-07-16

Published Print: 2024-09

Authors

Chen, Tin-Chih Toly

Wang, Yu-Cheng https://orcid.org/0000-0003-4339-1665
Lin, Chi-Wei
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Text and Data Mining valid from 2024-07-16

Version of Record valid from 2024-07-16
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Article History

Received: 7 March 2024

Accepted: 3 July 2024

First Online: 16 July 2024

Declarations

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: Not required.

: The authors declare no competing interests.

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