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Wafer sub-pixel alignment based on multi-scale residual channel attention network and multi-strategy improved sparrow search algorithm

Crossref DOI link: https://doi.org/10.1007/s00170-025-16237-9

Published Online: 2025-08-12

Published Print: 2025-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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