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Artificial neural network-driven diffraction imaging for nanoscale optical critical dimension metrology in semiconductor microstructures

Published Online: 2026-01-08

Published Print: 2026-02

Authors

Yang, Fu-Sheng

Chen, Liang-Chia https://orcid.org/0000-0001-9613-9936
Ho, Chao-Ching
Funding

Funding for this research was provided by:

National Science and Technology Council (NSTC 112-2221-E-002 -148 -MY3)
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Text and Data Mining valid from 2026-01-08

Version of Record valid from 2026-01-08
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Article History

Received: 26 August 2025

Accepted: 24 December 2025

First Online: 8 January 2026

Declarations

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: Not available.

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: Not available.

: The authors have no relevant financial or non-financial interests to disclose.

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