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Parametric optimization of laser micromachining for enhanced microchannel geometry and surface topography in MEMS: an experimental investigation

Published Online: 2026-03-25

Published Print: 2026-04

Authors

Rai, Santosh Kumar

Gupta, Mahesh Kumar

Singh, Kuwar Pratap

Uniyal, Arun

Kumar, Ashwani

Singla, Yogesh Kumar
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Text and Data Mining valid from 2026-03-25

Version of Record valid from 2026-03-25
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Article History

Received: 1 December 2025

Accepted: 2 March 2026

First Online: 25 March 2026

Declarations

:

: Statement: Not applicable.

: The authors declare that they have no conflict of interest.

: Not applicable

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