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Residual stress measurement of physical vapor deposition (PVD) AlTiN thin films - a comparative study of x-Ray diffraction-, Raman spectroscopic and ring core method

Crossref DOI link: https://doi.org/10.1007/s00170-026-18314-z

Published Online: 2026-05-13

Published Print: 2026-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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