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Thermodynamic study on the chemical vapor deposition of boron nitride from the BCl3–NH3–H2 system

Crossref DOI link: https://doi.org/10.1007/s00214-014-1583-5

Published Online: 2014-10-07

Published Print: 2014-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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