Electron beam induced surface activation: a method for the lithographic fabrication of nanostructures via catalytic processes
Crossref DOI link: https://doi.org/10.1007/s00339-014-8578-x
Published Online: 2014-07-04
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Marbach, Hubertus
Text and Data Mining valid from 2014-07-04