Mechanism study of sidewall damage in deep silicon etch
Crossref DOI link: https://doi.org/10.1007/s00339-014-8752-1
Published Online: 2014-09-07
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Meng, Lingkuan
Yan, Jiang
Text and Data Mining valid from 2014-09-07
