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Low-temperature post-deposition annealing investigation for 3D charge trap flash memory by Kelvin probe force microscopy

Crossref DOI link: https://doi.org/10.1007/s00339-014-8807-3

Published Online: 2014-10-11

Published Print: 2015-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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