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High aspect ratio, high-quality microholes in PMMA: a comparison between femtosecond laser drilling in air and in vacuum

Crossref DOI link: https://doi.org/10.1007/s00339-014-8955-5

Published Online: 2014-12-23

Published Print: 2015-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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