Structure, optical properties and thermal stability of HfErO films deposited by simultaneous RF and VHF magnetron sputtering
Crossref DOI link: https://doi.org/10.1007/s00339-015-8982-x
Published Online: 2015-01-23
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, H. Y.
He, H. J.
Zhang, Z.
Jin, C. G.
Yang, Y.
Wang, Y. Y.
Zhuge, L. J.
Ye, C.
Wu, X. M.
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