Evaluation of the fluorinated antisticking layer by using photoemission and NEXAFS spectroscopies
Crossref DOI link: https://doi.org/10.1007/s00339-015-9104-5
Published Online: 2015-03-31
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Haruyama, Yuichi
Nakai, Yasuki
Matsui, Shinji
Text and Data Mining valid from 2015-03-31
