Near-zero-residual layer nanoimprint based on hybrid nanoimprint soft lithography
Crossref DOI link: https://doi.org/10.1007/s00339-015-9195-z
Published Online: 2015-04-28
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cui, Yushuang
Lu, Jingjun
Fu, XinXin
Bian, Jie
Yuan, Changsheng
Ge, Haixiong
Chen, Yanfeng
Text and Data Mining valid from 2015-04-28