High-speed flattening of crystallized glass substrates by dressed-photon–phonon etching
Crossref DOI link: https://doi.org/10.1007/s00339-015-9466-8
Published Online: 2015-09-04
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nomura, W.
Yatsui, T.
Kawazoe, T.
Tate, N.
Ohtsu, M.
Text and Data Mining valid from 2015-09-04