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Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

Crossref DOI link: https://doi.org/10.1007/s00339-016-0250-1

Published Online: 2016-07-12

Published Print: 2016-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Li-Min

Wang, Chih-Yi

Jheng, Ciao-Ren

Wu, Syu-Jhan

Sai, Chen-Kai

Lee, Ya-Ju

Chiang, Ching-Yu

Shew, Bor-Yuan
Funding

Funding for this research was provided by:

Ministry of Science and Technology, Taiwan (MOST-103-2112-M-002-011)

Ministry of Science and Technology of Taiwan (MOST-103-2112-M-003-008-MY3)

National Taiwan Normal University (No. NTNU100-D-01)
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