Chemical etching mechanism and properties of microstructures in sapphire modified by femtosecond laser
Crossref DOI link: https://doi.org/10.1007/s00339-016-0664-9
Published Online: 2016-12-28
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Manyu
Hu, Youwang
Sun, Xiaoyan
Wang, Cong
Zhou, Jianying
Dong, Xinran
Yin, Kai
Chu, Dongkai
Duan, Ji’an
Funding for this research was provided by:
National Basic Research Program of China (973 Program (100000)
License valid from 2016-12-28