Material removal mechanism of 6H-SiC studied by nano-scratching with Berkovich indenter
Crossref DOI link: https://doi.org/10.1007/s00339-016-9802-7
Published Online: 2016-03-02
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Meng, Binbin
Zhang, Yong
Zhang, Feihu
Text and Data Mining valid from 2016-03-01