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Ion beam lithography with gold and silicon ions

Published Online: 2016-03-14

Published Print: 2016-04

Authors

Seniutinas, Gediminas

Balčytis, Armandas

Nishijima, Yoshiaki

Nadzeyka, Achim

Bauerdick, Sven

Juodkazis, Saulius
Funding

Funding for this research was provided by:

Australian Research Council (LP120100161)

Australian Research Council (DP130101205)

Australian Research Council (DP120102980)
License Information

Text and Data Mining valid from 2016-03-14

Version of Record valid from 2016-03-14
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Article History

Received: 17 August 2015

Accepted: 14 November 2015

First Online: 14 March 2016

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