Crossmark

Pulse energy packing effects on material transport during laser processing of $$<1|1|1>$$ < 1 | 1 | 1 > silicon

Crossref DOI link: https://doi.org/10.1007/s00339-017-1415-2

Published Online: 2017-11-28

Published Print: 2018-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Pangovski, Krste https://orcid.org/0000-0002-6601-1509
Teh, Peh Siong

Lin, Dejiao

Alam, Shaiful

Richardson, David J.

O’Neill, William
Funding

Funding for this research was provided by:

Technology Strategy Board (TP14/HVM/6/I/BD5665)
License Information

License valid from 2017-11-28