Influence of argon pressure and current density on substrate temperature during magnetron sputtering of hot titanium target
Crossref DOI link: https://doi.org/10.1007/s00339-017-1458-4
Published Online: 2017-12-16
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Komlev, Anton A.
Minzhulina, Ekaterina A.
Smirnov, Vladislav V.
Shapovalov, Viktor I. https://orcid.org/0000-0003-2196-6851
Funding for this research was provided by:
Russian Science Foundation (15-19-00076)
License valid from 2017-12-16