High-fidelity large area nano-patterning of silicon with femtosecond light sheet
Crossref DOI link: https://doi.org/10.1007/s00339-017-1459-3
Published Online: 2017-12-15
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sidhu, Mehra S.
Munjal, Pooja
Singh, Kamal P. http://orcid.org/0000-0003-2519-4668
Funding for this research was provided by:
Department of Science and Technology, INDIA
License valid from 2017-12-15