Tailored laser beam shaping for efficient and accurate microstructuring
Crossref DOI link: https://doi.org/10.1007/s00339-017-1530-0
Published Online: 2018-01-10
Published Print: 2018-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Häfner, T. http://orcid.org/0000-0002-5034-2872
Strauß, J.
Roider, C.
Heberle, J.
Schmidt, M.
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (SCHM2115/49-1, SCHM 2115/46-1)
Text and Data Mining valid from 2018-01-10
Article History
Received: 27 October 2017
Accepted: 25 December 2017
First Online: 10 January 2018