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Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Crossref DOI link: https://doi.org/10.1007/s00339-018-1634-1

Published Online: 2018-02-03

Published Print: 2018-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Liu, Xin https://orcid.org/0000-0002-5662-3990
Sanner, Nicolas

Sentis, Marc

Stoian, Razvan

Zhao, Wei

Cheng, Guanghua

Utéza, Olivier
Funding

Funding for this research was provided by:

China Scholarship Council (CSC NO. 201504910604)

National Natural Science Foundation of China (No. 61378019, No. 41427804)

Agence Nationale de la Recherche (project Smart-Lasir 11BS09026)
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Article History

Received: 27 October 2017

Accepted: 29 January 2018

First Online: 3 February 2018