In-volume structuring of silicon using picosecond laser pulses
Crossref DOI link: https://doi.org/10.1007/s00339-018-1715-1
Published Online: 2018-03-13
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kämmer, H.
Matthäus, G.
Nolte, S.
Chanal, M.
Utéza, O.
Grojo, D.
Funding for this research was provided by:
H2020 European Research Council (724480)
Text and Data Mining valid from 2018-03-13
Article History
Received: 22 December 2017
Accepted: 2 March 2018
First Online: 13 March 2018