Mechanism for phosphorus deactivation in silicon-based Schottky diodes submitted to MW-ECR hydrogen plasma
Crossref DOI link: https://doi.org/10.1007/s00339-018-2118-z
Published Online: 2018-09-18
Published Print: 2018-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Belfennache, D.
Madi, D.
Brihi, N.
Aida, M. S.
Saeed, M. A.
Text and Data Mining valid from 2018-09-18
Article History
Received: 26 July 2018
Accepted: 15 September 2018
First Online: 18 September 2018