Characterization of nano-crystalline Ti–W–N thin films for diffusion barrier application: a structural, microstructural, morphological and mechanical study
Crossref DOI link: https://doi.org/10.1007/s00339-018-2171-7
Published Online: 2018-11-11
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jalali, Reza
Parhizkar, Mojtaba
Bidadi, Hassan
Naghshara, Hamid
Eshraghi, Mohamad Javad
Text and Data Mining valid from 2018-11-11
Article History
Received: 30 May 2018
Accepted: 8 October 2018
First Online: 11 November 2018