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Precise sputtering of silicon dioxide by argon cluster ion beams

Crossref DOI link: https://doi.org/10.1007/s00339-018-2256-3

Published Online: 2018-11-20

Published Print: 2018-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Korobeishchikov, N. G.

Nikolaev, I. V.

Roenko, M. A.

Atuchin, V. V. https://orcid.org/0000-0002-7424-5604
Funding

Funding for this research was provided by:

Ministry of Education and Science of the Russian Federation (11.1402.2017/4.6)

Russian Foundation for Basic Research (16-52-48010, 17-01-00512, 17-52-53031)
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Article History

Received: 9 August 2018

Accepted: 15 November 2018

First Online: 20 November 2018