Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography
Crossref DOI link: https://doi.org/10.1007/s00339-019-2538-4
Published Online: 2019-04-08
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Weber, Dominik
Heimburger, Robert
Hildebrand, Dirk
Junghans, Toni
Schondelmaier, Gianina
Walther, Christian
Schondelmaier, Daniel
Text and Data Mining valid from 2019-04-08
Article History
Received: 10 January 2019
Accepted: 3 March 2019
First Online: 8 April 2019