Fabrication of microfluidic channels with various cross-sectional shapes using anisotropic etching of Si and self-alignment
Crossref DOI link: https://doi.org/10.1007/s00339-019-2600-2
Published Online: 2019-04-03
Published Print: 2019-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Dong-Ki
Kwon, Joo Yong
Cho, Young Hak http://orcid.org/0000-0002-7603-2063
Funding for this research was provided by:
National Research Foundation of Korea (NRF-2017R1D1A1B03029817)
Text and Data Mining valid from 2019-04-03
Article History
Received: 30 December 2018
Accepted: 30 March 2019
First Online: 3 April 2019