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Construction of grating structure model based on Gibbs free energy and experimental verification by micro-milling

Crossref DOI link: https://doi.org/10.1007/s00339-019-2675-9

Published Online: 2019-05-06

Published Print: 2019-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Ding, Wenyu

Cao, Ziyang https://orcid.org/0000-0001-8822-0689
Wang, Bangfu

Xu, Shunjie

Wang, Zhongwang
Funding

Funding for this research was provided by:

Research fund project of Suzhou University of Science and Technology (XKZ201604)

National Natural Science Foundation of China (51305286)

the International cooperation in high level demonstration construction project of Jiangsu province (MOE32UK2A20121234N)
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Article History

Received: 8 January 2019

Accepted: 27 April 2019

First Online: 6 May 2019