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Selective rear-side ablation of aluminum thin layers with ultrashort-pulsed laser radiation

Published Online: 2019-10-03

Published Print: 2019-10

Authors

Viertel, Tina https://orcid.org/0000-0002-5222-8256
Pabst, Linda

Ebert, Robby

Exner, Horst
Funding

Funding for this research was provided by:

European Social Fund (8221818)
License Information

Text and Data Mining valid from 2019-10-01

Version of Record valid from 2019-10-01
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Article History

Received: 16 July 2019

Accepted: 20 September 2019

First Online: 3 October 2019

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