Direct micro-structuring of Si(111) surfaces through nanosecond laser Bessel beams
Crossref DOI link: https://doi.org/10.1007/s00339-020-03608-0
Published Online: 2020-05-18
Published Print: 2020-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Demirci, Erkan
Kaya, Elif Turkan Aksit
Sahin, Ramazan https://orcid.org/0000-0002-9269-1528
Funding for this research was provided by:
Akdeniz Üniversitesi (FAY-2017-2530)
TUBITAK (100082)
Text and Data Mining valid from 2020-05-18
Version of Record valid from 2020-05-18
Article History
Received: 17 March 2020
Accepted: 6 May 2020
First Online: 18 May 2020