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Comparison of electrical and interfacial characteristics between atomic-layer-deposited AlN and AlGaN on a GaN substrate

Published Online: 2020-05-25

Published Print: 2020-06

Authors

Kim, Hogyoung

Yun, Hee Ju

Choi, Seok

Choi, Byung Joon
Funding

Funding for this research was provided by:

Ministry of Education (2017R1D1A1B03030400)
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Text and Data Mining valid from 2020-05-25

Version of Record valid from 2020-05-25
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Article History

Received: 12 August 2019

Accepted: 17 May 2020

First Online: 25 May 2020

Document is current