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High-speed observation of pulse energy and pulse width dependences of damage generation in SiC during ultrashort pulse laser drilling

Published Online: 2020-10-14

Published Print: 2020-11

Authors

Hattori, Junya

Ito, Yusuke https://orcid.org/0000-0002-3383-412X
Jo, Hiroshi

Nagato, Keisuke

Sugita, Naohiko
Funding

Funding for this research was provided by:

Japan Society for the Promotion of Science (19K23477)
License Information

Text and Data Mining valid from 2020-10-14

Version of Record valid from 2020-10-14
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Article History

Received: 4 July 2020

Accepted: 24 September 2020

First Online: 14 October 2020

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