Ultrashort-pulsed laser separation of glass-silicone-glass substrates: influence of material properties and laser parameters on dicing process and cutting edge geometry
Crossref DOI link: https://doi.org/10.1007/s00339-020-04192-z
Published Online: 2020-12-24
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Stroj, Sandra http://orcid.org/0000-0001-6387-4248
Plank, Wolfgang
Muendlein, Martin
Funding for this research was provided by:
FH Vorarlberg - University of Applied Sciences
Text and Data Mining valid from 2020-12-24
Version of Record valid from 2020-12-24
Article History
Received: 8 June 2020
Accepted: 5 December 2020
First Online: 24 December 2020